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MgF2 Substrate

Advantage

1.Good transmission
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  • MgF2 is used as a lens, prism and window for wavelength from 110nm to 7.5μm. It is a most suitable material as window for ArF Excimer Laser, for the reason of its good transmission at 193nm. It is also effective as an optical polarizing in the ultraviolet region.

    Properties:

    Densityg/cm3

    3.18

    Melting Point(℃)

    1255

    Thermal Conductivity

    0.3 Wm-1K-1 at 300K

    Thermal Expansion

    13.7 x 10-6 /℃ parallel c-axis

    8.9 x 10-6 /℃ perpendicular c-axis

    Knoop Hardness

    415 with 100g indenter (kg/mm2)

    Specific Heat Capacity

    1003 J/(kg.k)

    Dielectric Constant

    1.87  at 1MHz parallel c-axis

    1.45  at 1MHz perpendicular c-axis

    Youngs Modulus (E)

    138.5 GPa

    Shear Modulus (G)

    54.66 GPa

    Bulk Modulus (K)

    101.32 GPa

    Elastic Coefficient

    C11=164; C12=53; C44=33.7

    C13=63; C66=96

    Apparent Elastic Limit

    49.6 MPa (7200 psi)

    Poisson Ratio

    0.276

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